Abstract: Transparent conducting hybrid films were synthesized via a solgel route, using polyaniline (PANI) and hydrolytic polycondensed by［3(methacryloyloxy)propyl］trimethoxysilane (MATMS) as precursors. The results of infrared spectra and XPS spectrum indicated that the hybrid network between PANI and silane coupling agent was formed. The analysis of TGDTA curves showed that the thermal stability of PANIMATMS was better than that of pure PANI. Moreover, the effect of mass fractions of PANI on the transparence and sheet resistance of hybrid films was studied. The sheet resistance and the visible light transmittance of films decreased with an increase of PANI mass fraction. When the mass fraction of PANI was 30%, optimized properties for the hybrid films were obtained, whose visible light transmittance and sheet resistance reached 87% and 436 kΩ/□, respectively.