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    基于Box-Behnken响应面法优化SC1清洗热氧化膜工艺

    SC1 Cleaning Thermal Oxide Film Process Optimization Based on Box-Behnken Response Surface Method

    • 摘要: 为控制 SC1 清洗导致的热氧化膜损失以及晶圆内不均匀性增加的问题,采用 Box-Behnken 设计法设计实验,并结合响应面法对 SC1 清洗工艺的3个关键参数(即药液温度、药液配比(V_\mathrmNH_4\mathrmOH ∶V_\mathrmH_2\mathrmO_2 ∶V_\mathrmH_2\mathrmO ,下同)和工艺时间)进行优化。同时,探讨了各因素及其交互作用对清洗效果的影响。结果表明:当清洗时间固定为 90 s且待清洗的热氧化膜厚度为 3 nm时,药液温度为 30 ℃、药液配比为 1∶9.0∶50 的 SC1 化学液对氧化膜表面的影响最小;当药液温度为 60 ℃、药液配比为 1∶3.0∶50 时,热氧化膜的最大损失厚度为 0.065 nm,且晶圆内不均匀性增量控制在 1% 以内;当药液温度为 60 ℃、药液配比为 1∶6.5∶50 时,热氧化膜的最大损失厚度为 0.043 nm,且晶圆内不均匀性增量控制在 0.5% 以内;当药液温度为 55 ℃、药液配比为 1∶8.0∶50 时,热氧化膜损失厚度可维持在 0.020 nm,且表面不均匀性增量控制在 0.24% 以内。本研究为集成电路制造中 SC1 清洗工艺的参数选择提供了参考。

       

      Abstract: With the continuous progress of integrated circuit manufacturing processes, higher and higher requirements are placed on the surface quality of wafers after wet cleaning to ensure product yield. To mitigate the thermal oxide film loss and the exacerbated within-wafer non-uniformity induced by SC1 cleaning, experiments were designed using the Box-Behnken design (BBD) method, and the response surface methodology (RSM) was integrated to optimize three key parameters of the SC1 cleaning process: Chemical solution temperature, solution ratio (V_\mathrmNH_4\mathrmOH ∶V_\mathrmH_2\mathrmO_2 ∶V_\mathrmH_2\mathrmO ), and process duration. Additionally, the effects of individual factors and their interactive effects on the cleaning performance were systematically investigated. The results indicate the following: When the cleaning time is fixed at 90 s and the thickness of the thermal oxide film to be cleaned is 3 nm, the SC1 solution exhibits the minimal impact on the oxide film surface under the conditions of 30 ℃ and a solution ratio of 1∶9.0∶50; at a temperature of 60 ℃ and a ratio of 1∶3.0∶50, the maximum loss thickness of the thermal oxide film is 0.065 nm, with the increment of within-wafer non-uniformity controlled within 1%; when the solution temperature is 60 ℃ and the solution ratio is 1∶6.5∶50, the maximum loss thickness of the thermal oxide film is reduced to 0.043 nm, and the increment of within-wafer non-uniformity is constrained within 0.5%; under the conditions of 55 ℃ and a solution ratio of 1∶8.0∶50, the loss thickness of the thermal oxide film can be maintained at 0.020 nm, while the increment of surface non-uniformity is limited to 0.24%. This study provides a valuable reference for the parameter selection of the SC1 cleaning process in integrated circuit manufacturing.

       

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