Study on the Surface Properties of the Ultra Fine ZnO Particle Thin Film

Ultra fine ZnO particle film was prepared by the deposition method with DC gas discharge activating reaction, and their structure as well as particle size were analysed by XRD and SEM, the results showed that the sample is ZnO polycrystal, and the particle size is 88.5nm. In addition, the surface element ratio and electronic state were studied by using AES and XPS, it shows that Zn/O value closes to that of standard sample, the electronic state were Zn2p_(1/2), Zn2p_(3/2), C1s, O1s, the sulfate photovoltage spectra is influenced by ZnO grain size and substrate.