Influence of Pt Dopping on the Surface Structure and on theGas-Sensing Characteristics of Tin Oxide Ultrafine Particle Films

The Tin oxide ultrafine particle films were deposited by D. C. gas dischargeactivating reactive evaporation. The deposited films were dopped with platinum by magnetronSputtering.The surface structure and composition of the prepared films have been inves-tigated by AES and XRD. The electrical pxoperties and the effect of Pt addition on gas-sensingcharacteristics as well as its mechanisms have also been investigated.