Thermodynamic Study of AlN Powder Synthesis by CVD of Al-Cl-N-H System[J]. Journal of East China University of Science and Technology, 1992, (4).
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Citation:
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Thermodynamic Study of AlN Powder Synthesis by CVD of Al-Cl-N-H System[J]. Journal of East China University of Science and Technology, 1992, (4).
|
Thermodynamic Study of AlN Powder Synthesis by CVD of Al-Cl-N-H System[J]. Journal of East China University of Science and Technology, 1992, (4).
|
Citation:
|
Thermodynamic Study of AlN Powder Synthesis by CVD of Al-Cl-N-H System[J]. Journal of East China University of Science and Technology, 1992, (4).
|
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