Effect of Structural Parameters on Outlet Flow Field of Slot Nozzle

A new type of slot nozzle is proposed which is used to prepare the 6.5%Si steel by chemical vapor deposition method. The velocity distribution of the SiCl4 on the outlet under different structural parameters is studied by numerical simulation method. The influence of the structural parameters on the velocity distribution on the outlet was analyzed based on the design of experiment method. The optimal structural parameters were obtained through optimization analysis, and the simulation results were verified.