Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films

SnO_2 ultrafine particle films were deposited by d.c. gas discharge activating reaction evaporation. The ion beams with various energy were used to bombard the SnO_2 UPF.Influence of ion beam bombardment on the SnO_2 UPF surface morphology and chemical composition was analysed by SEM and AES. The gas sensing properties of SnO_2 UPF to C_2H_5OH gas before and after being bombarded were also studied.