Forming Factors of ZnO Ultrafine Particle and Influence of Three Beam Surface Modification on Its Topography and Structure

ZnO UFP(Ultrafine Paricle)was prepared by DC gas discharge aclivated reac tion deposition and influence factors on the forming of ZnO UFP were discussed.The effects of three beam(electron, ion, laser beam),plasma and heating treatment on topography and structure of ZnO UFP were also Studied. The results showed that the size of ZnO UFP increases and crystal structure is changed by laser beam irradiation,the original crystal face growth is restricted.