Application of the Self-tuning Fuzzy-PID Control in PCR Microchip Temperature Controller

A self-tuning temperature control system based on fuzzy-PID control for PCR microchip is introduced.The platinum micro-heater and micro-sensor were deposited on the backside of silicon chip by sputtering techniques.The cooling process is controlled by semiconductor device.The fuzzy-PID controller combines fuzzy rule control with PID precise output.The experiment results show the system has high control precision in fast temperature control for integrated PCR microchip.It can be used in near-field fluorescence detection on scanning near-field optical microscope.