Kinetics of Titanium Tetrachloride Oxidation in Chemical Vapor Deposition Reactor

In situ FTIR method was successfully used to observe the homogenous reaction on line in CVD reactor. Two important active intermediates TiOCl_2, TiCl_3 were observed. A more creditable kinetic mechanism was obtained based on these experimental data. The oxidation rate of TiCl_4 vapor was measured by FTIR quantitative analysis. The apparent activation energy for the reaction is 66.8kJ/mol.