Abstract: Zinc and zinc oxide films on glass substrate were prepared by ionized cluSter beam deposition and reaction ionized cluster beam deposition. The surface morphologies,chemical compositions,film structures and Surface fine structures of the films were studied by SEM,XRD,AES and SEELFS. The film growing processes were also discussed. The resuls show that the Zn film is a polycrystalline film,which grows preferentially in the direction of(002) plane with a island-like growth;the ZnO film exhibits an amorphous mesh structure,which is composed of Zn and O on the surface,and the interatomic distance between zinc and oxygen is 0.203nm.