Mechanism and Kinetics of Ti(OC-4H_9)_4 Pyrolysis in Chemical Vapor Deposition Reactor[J]. Journal of East China University of Science and Technology, 1992, (4).
Citation:
Mechanism and Kinetics of Ti(OC-4H_9)_4 Pyrolysis in Chemical Vapor Deposition Reactor[J]. Journal of East China University of Science and Technology, 1992, (4).