氧化锌超微粒子薄膜的表面性质研究

Study on the Surface Properties of the Ultra Fine ZnO Particle Thin Film

摘要: 用直流气体放电活化反应沉积的方法,制备了氧化锌超微粒子薄膜,并经AES成分分析及XRD物相结构鉴定,随制备条件不同,结构将明显改变。扫描电子显微镜(SEM)分析结果表明,粒子的粒径为88.5nm。用俄歇电子能谱(AES)、X射线光电子能谱(XPS)对超微柱子膜的表面成分此、表面电子态进行了研究,用Ar~+枪对样品表面进行了剥离,同时用AES作跟踪分析。结果表明,Zn/O比基本保持不变,C稍有减少。这和电子探针持续作用AES跟踪分析结果基本相同。样品表面的电子态是Zn2p_(1/2)、Zn2p_(3/2),Cls、Ols;粒径及基质对表面光电压谱有较大影响。

Abstract: Ultra fine ZnO particle film was prepared by the deposition method with DC gas discharge activating reaction, and their structure as well as particle size were analysed by XRD and SEM, the results showed that the sample is ZnO polycrystal, and the particle size is 88.5nm. In addition, the surface element ratio and electronic state were studied by using AES and XPS, it shows that Zn/O value closes to that of standard sample, the electronic state were Zn2p_(1/2), Zn2p_(3/2), C1s, O1s, the sulfate photovoltage spectra is influenced by ZnO grain size and substrate.