Abstract: By analyzing the cyber-physical systems (CPS),this paper proposes a method to deal with semantic parsing and semantic information processing of middle communication layer in CPS.The framework of chemical domain device ontology——OntoCD (Chemical Device Ontology) is constructed,and then the OWL (ontological description language),protégé (ontological development tool) and seven-step method (ontology modeling methods) are used to build the model of chemical domain device ontology.Finally,it is verified from the example of tower equipment selection of ethylbenzene dehydrogenation in styrene chemical process that the semantic parsing is effective for device ontology model in chemical industry.