流态化CVD制备超细Al_2O_3－SnO_2复合粒子过程模型研究

Modelling Study of Al_2O_3-SnO_2 Ultrafine Particle Composite Synthesis Process by Fluidiziation Chemical Vapor Deposition

摘要: 基于流态化ＣＶＤ制备超细复合粒子过程中的反应、成核、包敷、气流夹带，建立了流态化ＣＶＤ反应器中描述超细粒子的粒度、分布及成核包敷、成膜包敷的一维过程模型。针对ＳｎＣｌ＿４－Ｈ＿２Ｏ－Ｎ＿２体系包敷超细Ａｌ＿２Ｏ＿３粒子的过程，研究了反应器中ＳｎＯ＿２粒子的形成过程及操作参数对其在Ａｌ＿２Ｏ＿３粒子表面的淀积速率及形态的影响。结果表明，反应温度和ＳｎＣｌ＿４浓度升高，包敷速率加快，包敷形态变差；背景气氛粘度增大，包敷形态变优，包敷速率减小；操作气速增大，包敷速率加快，包敷形态变优。

Abstract: Based on the chemical reation,nucleation,coating and gas entraning in the flu-idization chemical vapor deposition reactor,one dimentional process model of particle size,film coating and nucleation coating was established.To the SnCl_4-H_2O-N_2 system,coating rate and morphology of SnO_2 with operating parameters were studied.The results showed that the coating rate increased with increasing reation temperature and SnCl_4 flux,but the coating morphology got worse with the gas viscosity increasing,the coating rate decreased but the coating morphology got better.