铂膜电阻型热式气体质量流量计的研制
Development of Pt Film-Resistor Thermal Mass Flowmeters for Gases
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摘要: 阐述了热式质量流量传感器的原理和结构。用铂膜电阻作为感温元件,研制了气体质量流量计,并给出试验结果。这种流量计具有性能稳定、响应速度快和制作方便等优点。Abstract: The principle and structure ot thermal mass flow transducer are described in (?). With Pt film resistor used as the temperature sensors, a mass flowmeter for gases is developed and the test result is also given. The flowmeters has the advantages of easily making, fast responce and high stability of performance.