Abstract:
SnO2-ZnO UPF(Ultrafine Particle Film)was prepared by DC gas discharge activiting reaction deposition technique. The effects of the compound technique on topography and phase microstructures of the bilayer UPF were studied by SEM,XRD.The results show that the surface particle sizes were mainly controlled by discharge voltage,oxygen gas pressure and the evaporation temperature. This bilayer UPF is a polycrystalline film which grows preferentially in the direction of SnO2(002)plane with a island-like growth,and composed of SnO,SnO2 phase;ZnO UPF layer exhibits amorphous structures.