Abstract: By using auger electron spectroscopy (AES) to determine surface composition, X-ray diffraction (XRD) to determine crystal structure, scanning electron microscope (SEM) to observe surface morphology and microhardness instrument to determine surface microhardness, hard coatings (TIN, Ti(C,N) & Ti(C, N, O)) prepared by metallo-organic chemical vapour deposition (MOCVD) are verified to have smooth surface good adherence to substrate and high hardness. Contrast to typical CVD method. MOCVD has two advantages that deposition temper-ature has been lowered so as to enlarge the range of substrate selection and solid-solution coat-ings. with wide application are obtained.