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    朱基千, 李标. Hg1—xCdxTe液相外延薄膜的貌相分析[J]. 华东理工大学学报(自然科学版), 1997, (1): 68-72.
    引用本文: 朱基千, 李标. Hg1—xCdxTe液相外延薄膜的貌相分析[J]. 华东理工大学学报(自然科学版), 1997, (1): 68-72.
    Investigation of the Morphology of Hg 1- x Cd x Te Liquid Phase Epitaxial Films[J]. Journal of East China University of Science and Technology, 1997, (1): 68-72.
    Citation: Investigation of the Morphology of Hg 1- x Cd x Te Liquid Phase Epitaxial Films[J]. Journal of East China University of Science and Technology, 1997, (1): 68-72.

    Hg1—xCdxTe液相外延薄膜的貌相分析

    Investigation of the Morphology of Hg 1- x Cd x Te Liquid Phase Epitaxial Films

    • 摘要: 用扫描电子显微镜、能量散射X-射线分析及金相显微镜等方法,研究了Hg1-xCdxTe液相外延薄膜的表面形貌与衬底沾污等的关系,以及外延层夹杂和晶界存在的影响。结果表明,衬底沾污及晶界的存在会使外延薄膜的貌相变差;生长前衬底表面覆盖可以减轻其表面沾污,用适当的回熔LPE工艺,可以改进外延层表面形貌及质量

       

      Abstract: Scaning electron micrscopy (SEM), energy despersive X ray analysis (EDX) and optical microscope were used to study the Hg 1- x Cd x Te liquid phase epitaxial (LPE) films. The results showed that the epi film morphology depended upon the substrate quality, the substrate preparation and growth condition. Quality substrate without grain boundary is the prerequisite for the production of perfect epi film. While a protected coverage on the substrate during the homogenization period and melt back LPE growth mode are also helpful to improve the surface morphology and quality.

       

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