离子束轰击对SnO2超微粒子薄膜性质的影响
Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films
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摘要: 采用直流气放电活化反应蒸发法,沉积成SnO2超微粒子薄膜。以不同能量的离子束轰击薄膜表面,用扫描电子显微镜、俄歇电子能谱仪等,分析了离子束作用对SnO2UPF表面形貌和化学组成的影响,同时研究了离子束作用前后,SnO2UPF对乙醇的气敏性质的变化。Abstract: SnO_2 ultrafine particle films were deposited by d.c. gas discharge activating reaction evaporation. The ion beams with various energy were used to bombard the SnO_2 UPF.Influence of ion beam bombardment on the SnO_2 UPF surface morphology and chemical composition was analysed by SEM and AES. The gas sensing properties of SnO_2 UPF to C_2H_5OH gas before and after being bombarded were also studied.