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    际慧, 陆元成. 离子束轰击对SnO2超微粒子薄膜性质的影响[J]. 华东理工大学学报(自然科学版), 1994, (5): 693-697.
    引用本文: 际慧, 陆元成. 离子束轰击对SnO2超微粒子薄膜性质的影响[J]. 华东理工大学学报(自然科学版), 1994, (5): 693-697.
    Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films[J]. Journal of East China University of Science and Technology, 1994, (5): 693-697.
    Citation: Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films[J]. Journal of East China University of Science and Technology, 1994, (5): 693-697.

    离子束轰击对SnO2超微粒子薄膜性质的影响

    Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films

    • 摘要: 采用直流气放电活化反应蒸发法,沉积成SnO2超微粒子薄膜。以不同能量的离子束轰击薄膜表面,用扫描电子显微镜、俄歇电子能谱仪等,分析了离子束作用对SnO2UPF表面形貌和化学组成的影响,同时研究了离子束作用前后,SnO2UPF对乙醇的气敏性质的变化。

       

      Abstract: SnO_2 ultrafine particle films were deposited by d.c. gas discharge activating reaction evaporation. The ion beams with various energy were used to bombard the SnO_2 UPF.Influence of ion beam bombardment on the SnO_2 UPF surface morphology and chemical composition was analysed by SEM and AES. The gas sensing properties of SnO_2 UPF to C_2H_5OH gas before and after being bombarded were also studied.

       

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