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    赵大春, 潘孝仁. ZnO超微粒子膜的形成因素及三束表面改性对其形貌,结构的影响[J]. 华东理工大学学报(自然科学版), 1994, (1): 70-74.
    引用本文: 赵大春, 潘孝仁. ZnO超微粒子膜的形成因素及三束表面改性对其形貌,结构的影响[J]. 华东理工大学学报(自然科学版), 1994, (1): 70-74.
    Forming Factors of ZnO Ultrafine Particle and Influence of Three Beam Surface Modification on Its Topography and Structure[J]. Journal of East China University of Science and Technology, 1994, (1): 70-74.
    Citation: Forming Factors of ZnO Ultrafine Particle and Influence of Three Beam Surface Modification on Its Topography and Structure[J]. Journal of East China University of Science and Technology, 1994, (1): 70-74.

    ZnO超微粒子膜的形成因素及三束表面改性对其形貌,结构的影响

    Forming Factors of ZnO Ultrafine Particle and Influence of Three Beam Surface Modification on Its Topography and Structure

    • 摘要: 用直流气体放电活化反应沉积法,制备了ZnO超微粒子(ZnOUFP)。讨论了影响ZnO UFP的形成因素;研究了三束(离子束、电子束、激光束)表面改性及等离子体、退火处理对ZnO UFP的形貌和结构的影响。结果表明,ZnOUFP有长大趋势,局部变成致密连续;且在激光束作用下ZnOUFP出现析晶,同时原有的晶面择优生长趋势受到抑制,晶粒长大。

       

      Abstract: ZnO UFP(Ultrafine Paricle)was prepared by DC gas discharge aclivated reac tion deposition and influence factors on the forming of ZnO UFP were discussed.The effects of three beam(electron, ion, laser beam),plasma and heating treatment on topography and structure of ZnO UFP were also Studied. The results showed that the size of ZnO UFP increases and crystal structure is changed by laser beam irradiation,the original crystal face growth is restricted.

       

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