化学气相淀积反应器内TiCl_4氧化反应动力学
Kinetics of Titanium Tetrachloride Oxidation in Chemical Vapor Deposition Reactor
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摘要: 采用原位红外测试技术,在线观测了化学气相淀积反应器内TiCl_4的均相氧化反应。捕获了两种重要活性中间体TiCl_3和TiOCl_2,从而导出该反应的机理模型。并采用尾气红外定量分析方法得到了TiCl_4氧化反应的动力学方程及反应活化能。反应活化能:66.8 kJ/mol,指前因子:2.45×10~2/s。Abstract: In situ FTIR method was successfully used to observe the homogenous reaction on line in CVD reactor. Two important active intermediates TiOCl_2, TiCl_3 were observed. A more creditable kinetic mechanism was obtained based on these experimental data. The oxidation rate of TiCl_4 vapor was measured by FTIR quantitative analysis. The apparent activation energy for the reaction is 66.8kJ/mol.