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    王松, 胡黎明, 郑柏存, 古宏晨. 化学气相淀积反应器内TiCl_4氧化反应动力学[J]. 华东理工大学学报(自然科学版), 1992, (4).
    引用本文: 王松, 胡黎明, 郑柏存, 古宏晨. 化学气相淀积反应器内TiCl_4氧化反应动力学[J]. 华东理工大学学报(自然科学版), 1992, (4).
    Kinetics of Titanium Tetrachloride Oxidation in Chemical Vapor Deposition Reactor[J]. Journal of East China University of Science and Technology, 1992, (4).
    Citation: Kinetics of Titanium Tetrachloride Oxidation in Chemical Vapor Deposition Reactor[J]. Journal of East China University of Science and Technology, 1992, (4).

    化学气相淀积反应器内TiCl_4氧化反应动力学

    Kinetics of Titanium Tetrachloride Oxidation in Chemical Vapor Deposition Reactor

    • 摘要: 采用原位红外测试技术,在线观测了化学气相淀积反应器内TiCl_4的均相氧化反应。捕获了两种重要活性中间体TiCl_3和TiOCl_2,从而导出该反应的机理模型。并采用尾气红外定量分析方法得到了TiCl_4氧化反应的动力学方程及反应活化能。反应活化能:66.8 kJ/mol,指前因子:2.45×10~2/s。

       

      Abstract: In situ FTIR method was successfully used to observe the homogenous reaction on line in CVD reactor. Two important active intermediates TiOCl_2, TiCl_3 were observed. A more creditable kinetic mechanism was obtained based on these experimental data. The oxidation rate of TiCl_4 vapor was measured by FTIR quantitative analysis. The apparent activation energy for the reaction is 66.8kJ/mol.

       

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