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    陈浩, 安琦. 直线电机滑台的空间位置精度研究[J]. 华东理工大学学报(自然科学版), 2018, (5): 765-774. DOI: 10.14135/j.cnki.1006-3080.20170628002
    引用本文: 陈浩, 安琦. 直线电机滑台的空间位置精度研究[J]. 华东理工大学学报(自然科学版), 2018, (5): 765-774. DOI: 10.14135/j.cnki.1006-3080.20170628002
    CHEN Hao, AN Qi. Space Position Accuracy of a Linear-Motor Rolling-Guide Stage[J]. Journal of East China University of Science and Technology, 2018, (5): 765-774. DOI: 10.14135/j.cnki.1006-3080.20170628002
    Citation: CHEN Hao, AN Qi. Space Position Accuracy of a Linear-Motor Rolling-Guide Stage[J]. Journal of East China University of Science and Technology, 2018, (5): 765-774. DOI: 10.14135/j.cnki.1006-3080.20170628002

    直线电机滑台的空间位置精度研究

    Space Position Accuracy of a Linear-Motor Rolling-Guide Stage

    • 摘要: 直线电机滑台作为直线电机的支撑机构,常被应用在高精度的直线运动场合。直线电机滑台机构在运动过程中会受到磁推力、重力等多种外力作用,使滑台机构发生弹性变形,产生空间位置误差。通过力学建模,分析了直线电机滑台机构在外载荷作用下的位移同滚珠变形的关系,并基于赫兹接触公式,得到了滑台空间位置精度的计算模型。通过该计算模型分析了滑台的质量和质心位置、工件的质量和安装位置、电枢的安装高度、滑台的加速度以及滚珠的预压变形对滑台的空间位置精度的影响。研究发现:当工件质量不大时,工件质量和安装位置对滑台空间位置精度的影响规律与滑台质量和质心位置对其的影响规律相同,即滑台随着工件安装位置或滑台质心位置的偏移在偏移方向上线性移动,随着工件或滑台质量的增加在空间3个方向上线性移动;当工件质量较大时,滑台空间位置的变化随着工件质量的增加呈现出非线性特点;当电枢安装高度与滑台质心高度不一致且滑台加速移动时,滑台在加速的反方向上发生与加速度成比例的线性移动,且两者相距越远比例系数越大;增大滚珠预压变形可提高滑台的空间位置精度,但也会增大滚珠的最大接触应力。

       

      Abstract: As the support mechanism of linear motor, the linear-motor rolling-guide stage is often used in high precision linear motion. When working, the stage suffers a variety of forces such as magnetic thrust, gravity in movement, which will result in elastic deformation and space position error of stage. In this paper, the relationship between the deformation of balls and the displacement of linear-motor rolling-guide stage under external loads is analyzed by mechanical modelling and the calculating model of space position accuracy of the stage is established on the basis of Hertz contact formula. By using the calculating model the influences of the mass and the barycenter position of stage, installation position and mass of workpiece, installation height of armature, acceleration of stage and preloading deformation of balls on the space position accuracy of the stage are studied. When the mass of workpiece is small, the effect of the mass and installation positon of the workpiece on its space position accuracy is the same as the effect of the mass and barycenter of stage itself, that is, the stage moves linearly and in the same direction with the increasing of deviation of the installation positon of workpiece or the barycenter position of stage and moves linearly in three directions of space with the increasing of mass of workpiece or stage itself. When the mass of workpiece is large, the space position of stage will change nonlinearly with the increasing of mass of workpiece. When the installation height of armature is not the same as the height of barycenter of stage, it moves linearly in the opposite direction with acceleration increasing and the farther the distance of the two is, the greater the proportionality coefficient becomes. The increasing of preloading deformation of balls can improve the space position accuracy of stage but also increase the balls' maximum contact stress.

       

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